a to electron-beam expose

експонувати електронним променем

English-Ukrainian dictionary of microelectronics. 2013.

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  • Electron beam lithography — (often abbreviated as e beam lithography) is the practice of scanning a beam of electrons in a patterned fashion across a surface covered with a film (called the resist),cite book |last= McCord |first=M. A. |coauthors=M. J. Rooks |title=… …   Wikipedia

  • Ion beam — An ion beam is a type of particle beam consisting of ions. Ion beams have many uses in electronics manufacturing (principally ion implantation) and other industries. Today s ion beam sources are typically derived from the mercury vapor thrusters… …   Wikipedia

  • Multiple patterning — is a class of technologies developed for photolithography to enhance the feature density. The simplest case of multiple patterning is double patterning, where a conventional lithography process is enhanced to produce double the expected number of …   Wikipedia

  • surface analysis — ▪ chemistry Introduction       in analytical chemistry (chemistry), the study of that part of a solid that is in contact with a gas or a vacuum. When two phases of matter are in contact, they form an interface. The term surface is usually… …   Universalium

  • X-ray photoelectron spectroscopy — [ right|thumb|350px|Basic components of a monochromatic XPS system.] X ray photoelectron spectroscopy (XPS) is a quantitative spectroscopic technique that measures the elemental composition, empirical formula, chemical state and electronic state… …   Wikipedia

  • Maskless lithography — In maskless lithography, the radiation that is used to expose a photosensitive emulsion (or photoresist) is not projected from, or transmitted through, a photomask.[1] Instead, most commonly, the radiation is focused to a narrow beam. The beam is …   Wikipedia

  • Microelectromechanical systems — (MEMS) (also written as micro electro mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano scale into… …   Wikipedia

  • Nanotube nanomotor — A device generating linear or rotational motion using carbon nanotube(s) as the primary component, is termed a nanotube nanomotor. Nature already has some of the most efficient and powerful kinds of nanomotors. Some of these natural biological… …   Wikipedia

  • computer — computerlike, adj. /keuhm pyooh teuhr/, n. 1. Also called processor. an electronic device designed to accept data, perform prescribed mathematical and logical operations at high speed, and display the results of these operations. Cf. analog… …   Universalium

  • printing — /prin ting/, n. 1. the art, process, or business of producing books, newspapers, etc., by impression from movable types, plates, etc. 2. the act of a person or thing that prints. 3. words, symbols, etc., in printed form. 4. printed material. 5.… …   Universalium

  • Collimator — Example of a particle collimator A collimator is a device that narrows a beam of particles or waves. To narrow can mean either to cause the directions of motion to become more aligned in a specific direction (i.e., collimated or parallel) or to… …   Wikipedia

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